Oneof the valuable inorganic multifunctional chemical substances is silica,which can be found in crystalline, gel,and amorphous forms. On the crust of the earth, silica is the most complex and abundant family of materials, and ithas been used extensively in ceramics, adhesives, detergents, dental materials, electronics, pharmaceutical items,and chromatography column packing. Several kinds of research have fascinated the recycling of agricultural wastes using extraction for useful products such as silica, lignin, adsorbents, cellulose, biofuels, silicon, carbon,and inhibitors. In this review article, we report most of the silica nanoparticles extracted from the Poaceae family since they accumulate significant amounts of silica,and most of them are easily found in Malaysia. This study investigates the significant amount of extracting silica nanoparticles from the Poaceae family via green technology sol-gel technique as pure silica can be produced with thepotential to manage the size of the particle, size of distribution,and morphology via the reaction parameters in systematic monitoring. This technique can also produce pure silica usinga low-energy method. Subsequently, the key chemical compounds that existed in silica nanoparticles are characterized and identified using FTIR analysis. According to this article, most of the Poaceae family species are considered to gain a high purity of above 90% of silica based on the quantification results. The Poaceae family is recognized for having high silicon concentrations. However, the concentration varies depending on the species.Keywords—Silica nanoparticles, Poaceae family, sol-gel, characterization, FTIR.I.INTRODUCTIONSilica is known as a mineral component that representssilicon and oxygen and is categorized as the two most abundant elements in the crust of the earth,which can be found in crystalline, amorphous,and aqueous forms. In synthetic chemistry, silica is applied as a significant precursor for various organometallic and inorganic materials, such as thin films or coatings for electronic catalysts and optical materials [1]. However, instead of using naturalsilica compounds,which arehydrophilic, silica nanoparticles are more in demand nowadays since they provide more crucial benefits than naturalsilica compounds. Some of the general benefits are easeoffunctionalization, biocompatibility, large surface area, site-directed delivery, high loading capacity,and in a few situations, actuated drug release in antimicrobial therapeutics in the medical fields [2].Nanoparticles are defined as particles with a size less than 1000nm by the Food and Drug Administration (FDA).