Publication:
Correlation between Microstructure of Copper Oxide Thin Films and Its Gas Sensing Performance at Room Temperature

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dc.ConferencecodeUniv Malaysia Perlis, Malaysian Agr Res & Dev Inst, Malaysian Biotechnol Corp Sdn Bhd, Japan Assoc Chem Sensors, Inno Lab Engn Sdn Bhd, Metrohm Sdn Bhd, Green Sci Sdn Bhd, Adsitech Sdn Bhd, NS ARIES SDN BHD, Sentech Korea Corp
dc.ConferencedateNOV 16-17, 2015
dc.ConferencelocationPenang, MALAYSIA
dc.Conferencename11th Asian Conference on Chemical Sensors (ACCS)
dc.contributor.authorNayan, Nen_US
dc.contributor.authorSandan, MZen_US
dc.contributor.authorWei, LJen_US
dc.contributor.authorAhmad, MKen_US
dc.contributor.authorLias, Jen_US
dc.contributor.authorFhong, SCen_US
dc.contributor.authorShakaff, AYMen_US
dc.contributor.authorZakaria, Aen_US
dc.contributor.authorZain, AFMen_US
dc.date.accessioned2024-05-29T02:56:04Z
dc.date.available2024-05-29T02:56:04Z
dc.date.issued2016
dc.description.abstractRadio-frequency magnetron sputtering using a Cu target was used to deposit cuprous oxide and cupric oxide thin films on silicon wafer. The substrate bias voltage and the O-2 flow ratio were varied during the deposition. The deposited thin films were characterized using scanning electron microscope. We found that the spherical and pyramid shapes structure of copper oxide thin films were deposited at critical O-2 flow ratio between 7 and 14%. The influence of substrate bias voltage was small and negligible. The deposited thin films were used for sensing characterization using ethanol vapor. Experimental results reveal that the pyramid shape of copper oxide thin film contribute to high respond rate when exposed to ethanol vapor. The respond and recovery rates which were measured at room temperature were very fast. This work had successfully demonstrated the formation of optimized copper oxide thin films and their usage for gas sensing application. (C) 2016 The Authors. Published by Elsevier B.V.
dc.identifier.doi10.1016/j.proche.2016.07.007
dc.identifier.epage51
dc.identifier.issn1876-6196
dc.identifier.scopusWOS:000387292100008
dc.identifier.spage45
dc.identifier.urihttps://oarep.usim.edu.my/handle/123456789/11563
dc.identifier.volume20
dc.languageEnglish
dc.language.isoen_US
dc.publisherElsevier Science Bven_US
dc.relation.ispartof11th Asian Conference On Chemical Sensors
dc.sourceWeb Of Science (ISI)
dc.subjectMagnetron sputtering plasmaen_US
dc.subjectThin filmen_US
dc.subjectCopper oxideen_US
dc.subjectGas sensoren_US
dc.titleCorrelation between Microstructure of Copper Oxide Thin Films and Its Gas Sensing Performance at Room Temperature
dc.typeProceedings Paperen_US
dspace.entity.typePublication

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