Rashid A.R.A.Menon P.S.Shaari S.2024-05-292024-05-29201097807400000000094243X10.1063/1.35155272-s2.0-79951890750https://www.scopus.com/inward/record.uri?eid=2-s2.0-79951890750&doi=10.1063%2f1.3515527&partnerID=40&md5=7e16f028c0e2befb626265a3033b1847https://oarep.usim.edu.my/handle/123456789/9779Mn doped ZnO films with different annealing temperatures were synthesized by sol gel method using a spin coating technique. The annealing temperature was varied from 500�C, 550�C, and 700�C. The atomic force microscopy images show the surface morphologies change greatly with an increase in annealing temperature and it also depends on the type of substrate used. The XRD analysis show the films exhibiting hexagonal wurtzite structure with increasing crystalline size at higher temperatures. The optical properties were characterized using UV-Vis where the transmittance decreases due to ionization at higher temperatures which affect the material band gap. � 2010 American Institute of Physics.en-USannealing temperaturesDMSMn dopingsol gel methodConference Paper1091121284